995301 - Statement - Condensed Consolidated Balance Sheets link:presentationLink link:definitionLink link:calculationLink 995302 - Statement - Condensed Consolidated Balance Sheets (Parentheticals) link:presentationLink link:definitionLink link:calculationLink 995303 - Statement - Condensed Consolidated Statements of Operations link:presentationLink link:definitionLink link:calculationLink 995304 - Statement - Condensed Consolidated Statements of Cash Flows link:presentationLink link:definitionLink link:calculationLink 995305 - Statement - Condensed Consolidated Statements of Changes in Stockholders' Equity link:presentationLink link:definitionLink link:calculationLink 995306 - Disclosure - CONDENSED CONSOLIDATED FINANCIAL STATEMENTS link:presentationLink link:definitionLink link:calculationLink 995307 - Disclosure - EARNINGS PER SHARE link:presentationLink link:definitionLink link:calculationLink 995308 - Disclosure - CONTRACT ASSETS AND LIABILITIES link:presentationLink link:definitionLink link:calculationLink 995309 - Disclosure - EMPLOYEE BENEFIT PLANS link:presentationLink link:definitionLink link:calculationLink 995310 - Disclosure - INVENTORIES link:presentationLink link:definitionLink link:calculationLink 995311 - Disclosure - RIGHT-OF-USE ASSETS AND LEASE LIABILITIES link:presentationLink link:definitionLink link:calculationLink 995312 - Disclosure - SEGMENT INFORMATION link:presentationLink link:definitionLink link:calculationLink 995313 - Disclosure - INVESTMENT IN MORION, INC. link:presentationLink link:definitionLink link:calculationLink 995314 - Disclosure - RESTRICTED CASH link:presentationLink link:definitionLink link:calculationLink 995315 - Disclosure - RECENT ACCOUNTING PRONOUNCEMENTS link:presentationLink link:definitionLink link:calculationLink 995316 - Disclosure - DEFERRED INCOME TAXES link:presentationLink link:definitionLink link:calculationLink 995317 - Disclosure - PRODUCT WARRANTIES link:presentationLink link:definitionLink link:calculationLink 996000 - Disclosure - EARNINGS PER SHARE (Tables) link:presentationLink link:definitionLink link:calculationLink 996001 - Disclosure - INVENTORIES (Tables) link:presentationLink link:definitionLink link:calculationLink 996002 - Disclosure - RIGHT-OF-USE ASSETS AND LEASE LIABILITIES (Tables) link:presentationLink link:definitionLink link:calculationLink 996003 - Disclosure - SEGMENT INFORMATION (Tables) link:presentationLink link:definitionLink link:calculationLink 996004 - Disclosure - RESTRICTED CASH (Tables) link:presentationLink link:definitionLink link:calculationLink 996005 - Disclosure - PRODUCT WARRANTIES (Tables) link:presentationLink link:definitionLink link:calculationLink 996006 - Disclosure - EARNINGS PER SHARE (Details) link:presentationLink link:definitionLink link:calculationLink 996007 - Disclosure - EARNINGS PER SHARE - Schedule of Earnings Per Share, Basic and Diluted (Details) link:presentationLink link:definitionLink link:calculationLink 996008 - Disclosure - CONTRACT ASSETS AND LIABILITIES (Details) link:presentationLink link:definitionLink link:calculationLink 996009 - Disclosure - EMPLOYEE BENEFIT PLANS (Details) link:presentationLink link:definitionLink link:calculationLink 996010 - Disclosure - INVENTORIES - Schedule of Inventory, Current (Details) link:presentationLink link:definitionLink link:calculationLink 996011 - Disclosure - RIGHT-OF-USE ASSETS AND LEASE LIABILITIES (Details) link:presentationLink link:definitionLink link:calculationLink 996012 - Disclosure - RIGHT-OF-USE ASSETS AND LEASE LIABILITIES - Lease, Cost (Details) link:presentationLink link:definitionLink link:calculationLink 996013 - Disclosure - RIGHT-OF-USE ASSETS AND LEASE LIABILITIES - Lessee, Operating Lease, Liability, Maturity (Details) link:presentationLink link:definitionLink link:calculationLink 996014 - Disclosure - SEGMENT INFORMATION (Details) link:presentationLink link:definitionLink link:calculationLink 996015 - Disclosure - SEGMENT INFORMATION - Schedule of Reconciliation of Revenue from Segments to Consolidated (Details) link:presentationLink link:definitionLink link:calculationLink 996016 - Disclosure - SEGMENT INFORMATION - Schedule of Cost of revenues (Details) link:presentationLink link:definitionLink link:calculationLink 996017 - Disclosure - SEGMENT INFORMATION - Schedule of Research and development expenses (Details) link:presentationLink link:definitionLink link:calculationLink 996018 - Disclosure - SEGMENT INFORMATION - Schedule of Operating income (Details) link:presentationLink link:definitionLink link:calculationLink 996019 - Disclosure - SEGMENT INFORMATION - Schedule of Reconciliation of Assets from Segment to Consolidated (Details) link:presentationLink link:definitionLink link:calculationLink 996020 - Disclosure - SEGMENT INFORMATION - Schedule of Depreciation and amortization (Details) link:presentationLink link:definitionLink link:calculationLink 996021 - Disclosure - SEGMENT INFORMATION - Schedule of Disaggregation of Revenue (Details) link:presentationLink link:definitionLink link:calculationLink 996022 - Disclosure - SEGMENT INFORMATION - Schedule of Revenue from External Customers by Products and Services (Details) link:presentationLink link:definitionLink link:calculationLink 996023 - Disclosure - INVESTMENT IN MORION, INC. (Details) link:presentationLink link:definitionLink link:calculationLink 996024 - Disclosure - RESTRICTED CASH (Details) link:presentationLink link:definitionLink link:calculationLink 996025 - Disclosure - RESTRICTED CASH - Schedule of Reconciliation of Cash and Cash Equivalents And Restricted Cash (Details) link:presentationLink link:definitionLink link:calculationLink 996026 - Disclosure - DEFERRED INCOME TAXES (Details) link:presentationLink link:definitionLink link:calculationLink 996027 - Disclosure - PRODUCT WARRANTIES - Schedule of Product Warranty Liability (Details) link:presentationLink link:definitionLink link:calculationLink 000 - Document - Document And Entity Information link:presentationLink link:definitionLink link:calculationLink